Original Research
RF magnetron sputtered deposited metal-doped diamond like carbon thin films: structural, morphological, mechanical, and optical properties
S. Majeed
a
K. Siraj
a
M. Fiaz Khan
a
M. I. Khan
b
S. Naseem
c
Shaimaa A.M. Abdelmohsen
d
Hosam O. Elansary
e

aLaser and Optronics Centre, Department of Physics, University of Engineering and Technology, Lahore, Pakistan

bDepartment of Physics, The University of Lahore, 53700, Pakistan

c Centre of Excellence in Solid State Physics, University of the Punjab, Lahore, Pakistan

dDepartment of Physics, College of Science, Princess Nourah bint Abdulrahman university. P.O.Box 84428, Riyadh 11681, Saudi Arabia

ePlant Production Department, College of Food and Agriculture Sciences, King Saud University, Riyadh 11451, Saudi Arabia


Journal of Ovonic Research 2022, 18(3),331-341; https://doi.org/10.15251/JOR.2022.183.331
Submitted:Oct 06, 2021
Accepted:May 05, 2022
Published:May 01, 2022
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Cite This Article
S. Majeed ,K. Siraj ,M. Fiaz Khan ,M. I. Khan ,S. Naseem ,Shaimaa A.M. Abdelmohsen ,Hosam O. Elansary . (2022). Journal of Ovonic Research. RF magnetron sputtered deposited metal-doped diamond like carbon thin films: structural, morphological, mechanical, and optical properties, 18(3), ,331-341. https://doi.org/10.15251/JOR.2022.183.331
Abstract

The present study investigates the surface, structural, mechanical and optical properties of (0, 1%, 2%, 3%, 4%, 5%) palladium doped diamond like carbon (Pd;DLC) thin films prepared by using r. f. magnetron sputtering technique. The structural, mechanical, surface, and optical properties were measured by Energy Dispersive X-rays (EDX), Raman spectroscopy, Vickers Hardness Measurement (VHM), atomic force microscopy (AFM), and Spectroscopy Ellipsometry, respectively. EDX results clearly indicated the presence of palladium metal into DLC matrix. Raman spectroscopy results reveal that all Raman spectra consist of two main peaks as D-band (1355.7 to 1359.3) and G-band (1558.9 to 1577.9).

Additionally, ID/IG ratio increases monotonically from 0.391 to 0.504 with increasing palladium concentration. With increasing doping concentration, AFM shows a modest increase in roughness of Pd-DLC thin films. The decline in the hardness of Pd-DLC films from 9.38 Gpa for 1% to 8.90 Gpa for 5% were observed by using Vickers Hardness Measurement (VHM). Spectroscopy ellipsometry showed that Eg reduced from 2.11 to 1.68 eV by adding the palladium concentration in Pd-DLC film. The decrease in the optical bandgap energy over the wide range is due to enrichment of sp2 contents than undoped film. The results reveal that incorporation of palladium produced prominent change in different properties of DLC film by increasing sp2 content. At 5% doping 1.68 eV band gap is achieved which is very ideal for solar cells fabrication. Therefore, this film is very good for solar cells and LEDs fabrications.

©2026 by the authors. Submitted for possible open access publication under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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