^aPhysics Department, Faculty of Science, Islamic University, P. O. Box 170, Al

Madinah, Saudi Arabia

^bPhysics Department, Faculty of Science, Minia University, 61519, El Minia,

Egypt

^cPhysics Department, Faculty of Science, Al-Azhar University, Assuit, 71542,

Egypt

To form a better view of the influences of Al in ZnO, the crystalline structure parameters and morphological (via SEM) of Zn1-xAlxO (x=0.0, 0.02, 0.04, 0.06, 0.08 and 0.10) thin films organized onto glass substrates using by spin coating technique. The effects of Al doping on the structural ZnO nano crystalline films are investigated using (XRD), (EDAX) and (SEM). Rietveld refinement was used to examine the XRD patterns of Zn1- xAlxO thin films. This was done using Fullprof software. The XRD results showed that Al ions successfully replaced the Zn2+ lattice sites without any major change in the structure after Zn2+ substitution, and their crystallinity decreased with increasing Al doping content.

Also, The XRD analysis confirmed the hexagonal structure. Lattice constant, Cell volume, Atomic Packing Fraction and surface density have been calculated. The microstructural parameters, crystallite size and lattice strain of Zn1-xAlxO thin films were calculated. The changes in microstructural parameters were discussed as dependent Al concentration. The Zn–O bond lengths and bond angle of Zn1-xAlxO were determined and have changed.