HomeH. Aissani
a
K. Hamib
A. Talhib
aNormal Higher School of Bechar, Algeria laboratory of Environmental and
Energetic Systems, University Centre Ali Kafi Tindouf, Algeria
Journal of Ovonic Research 2023, 19(3),345-349; https://doi.org/10.15251/JOR.2023.193.345
Submitted：Mar 15, 2023
Accepted：Jun 15, 2023
Published：Jul 05, 2023
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Cite This Article
H. Aissani ,K. Hamib ,A. Talhib . (2023). Journal of Ovonic Research. Study effect of incidence angle on ion implantation in ZnO matrix, 19(3), ,345-349. https://doi.org/10.15251/JOR.2023.193.345
Abstract
The ion implantation method is one of the techniques used to dope the materials. The TRIM software (Transport and Range of Ions in Mater) created by Ziegler and colleagues
[ 1] can simulate it. In this work, we studied the effect of incidence angles for different energies on the distribution of implant ions in the target by using the TRIM software, and several processes resulting from the interaction between Potassium ions and the target atoms are examined. Simulated physical effects are intriguing.
©2026 by the authors. Submitted for possible open access publication under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
