^aOvidius University of Constanta, 124 Mamaia Avenue, Constanta, Constanta, Romania 900527

^bNational Institute for Lasers, Plasma and Radiation Physics, P.O. Box MG-36, 077125 Bucharest Romania

c University Politehnica of Bucharest, Faculty of Applied Chemistry and Material Science,Department of Oxide Materials and Nanomaterials, No. 1–7 Gh. Polizu Street, Bucharest 011061, Romania

^dCERONAV Constanta, Pescarilor Street no. 69A, 900581 Constanta, Romania eAcademy of Romanian Scientists, Splaiul Independentei No. 54, Bucharest

050094, Romania

^fNational Institute for Materials Physics, Atomistilor No. 405, 077125, Magurele, Romania

^gNational Institute for Marine Research and Development "Grigore Antipa" 300 Mamaia Avenue, Constanta, Romania 90058

Carbon-Titanium multilayer and composite thin films were obtained by Thermionic Vacuum Arc (TVA) method. The nanostructured films consisted by a carbon base layer and seven alternatively Titanium and Carbon layers were deposed on Silicon substrate. As well, to give C-Ti multilayer films with different percentages in Ti and C of layers, a thick Carbon base layer was deposed on Si substrate, and then seven Ti-C layers. In order to achieve the successively layers with C, and Ti different percentages, were adjusted the discharge parameters of C and Ti plasma sources to obtain the desired composition of layers. By changing of substrate temperature, and on the other hand the bias potential up to

–700V, different batches of samples were obtained. Characterization of structural properties of films was achieved by Grazing Incidence X-ray Diffraction (GIXRD) and Electron Microscopy technique (TEM). The measurements show that increase of the substrate temperature reveal the changes in TixCy lattice parameters. The tribological measurements were performed using a ball-on-disk system with normal forces of 0.5, 1, 2, 3N respectively and a Bruker Hystrion TI 980 TriboIndenter. Was found that the coefficient of friction depends on the synthesis temperature, bias voltage and also by the C content, Ti content and amount of TiC nanocrystallites. To characterize the electrical conductive properties, the electrical surface resistance versus temperature have been measured, and then the electrical conductivity is calculated. Using the Wiedeman-Frantz law was obtained the thermal conductivity.